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プラズマエネルギーシステム研究室

豊橋技術科学大学

電気・電子情報工学系

滝川・須田研究室

研究論文 真空アーク,薄膜合成,プラズマ表面処理












Updated July 28, 2015
 自然エネルギー、エコエネルギー関連はこちら                                   --- Top pages (1st pages) are available in PDF. ---
 104. "Second by second prediction of solar power generation based on cloud shadow behavior estimation near a power station"
R. Nomura, T, Harigai, Y. Suda, H, Takikawa
AIP Conference Proceedings, 1807, pp.020024_1-10(2017.1), doi:http://dx.doi.org/10.1063/1.4974806
 103. “Dry machining of metal using an engraving cutter coated with a droplet-free ta-C film prepared via a T-shape filtered arc deposition”
Y. Fujii, T. Imai, Y. Miyamoto, N. Ueda, M. Hosoo, T. Harigai, Y. Suda, H. Takikawa, H. Tanoue, M. Kamiya, M. Taki, Y. Hasegawa, N. Tsuji, S. Kanekoe
Surface & Coatings Technology, Vol.307-B, pp.1029-1033 (2016.12), doi:http://dx.doi.org/10.1016/j.surfcoat.2016.07.037
 102. “Development of gliding arc plasma jet with a bent nozzle for pre-treatment of inkjet printing in roll-to-roll processlng”
Y. Uchida, S. Okuda, N. Hayashi, T. Harigai, Y. Suda, H. Takikawa, H. Tanoue, I. Yamamoto, H. Shiki
Frontier of Applied Plasma Tlechnology, Vol.9, No.2, pp.55-60 (2016.7)
 101. “Preparation of self-supporting Au thin films on perforated substrate by releasing from water-soluble sacrificial layer”
Y. Miyamoto, Y. Fujii, M. Yamano, T. Harigai, Y. Suda, H. Takikawa, T. Kawano, M. Nishiuchi, H. Sakaki, K. Kondo
Japanese Journal of Applied Physics , Vol.55, 0pp.7LE054-1-5 (2016.7), doi:http://doi.org/10.7567/JJAP.55.07LE05
 100. “Optical properties of graphitic carbon nitride films prepared by evaporation”
S. Fujita, H. Habuchi, S. Takagi, H. Takikawa
Diamond & Related Materials, Vol.65, pp.83-86 (2016.5), doi:10.1016/j.diamond.2016.02.008
99. “Fabrication of diamond-like carbon microgears in room-temperature curing nanoimprint lithography using ladder-type hydrogen silsesquioxanen”
S. Kiyohara, Y. Shimizu, I. Ishikawa, T. Harigai, H. Takikawa, M. Watanabe, Y. Sugiyama, Y. Omata, Y. Kurashima
MRS Advances, Vol.1, pp.1119-6124 (2016.2), doi:10.1557/adv.2016.126
98. “Fabrication of diamond-like carbon emitter patterns by room-temperature curing nanoimprint lithography with PDMS molds using polysiloxane”
S. Kiyohara, S. Yoshida, I. Ishikawa, T. Harigai, H. Takikawa, M. Watanabe, Y. Sugiyama, Y. Omata, Y. Kurashima
MRS Advances,Vol.1, pp.1075-1080 (2016.1), doi:10.1557/adv.2016.49
  97. “Multigraphene growth on lead-pencil drawn sliver halide print paper irradiated by scanning femtosecond laser”
S. Kaneko, Y. Shimizu, T. Rachi, C. Kato, S. Tanaka, Y. Naganuma, T. Katakura, K. Satoh, M. Ushiyama, S. Konuma, Y. Itou, H. Takikawa, G. Tan, A. Matsuda, M. Yoshimoto
Japanese Journal of Applied Physics, Vol.55, 01AE24-1-4 (2015.12)), doi:http://doi.org/10.7567/JJAP.55.01AE24
  96. “Expansion of lattice constants of aluminum nitride thin film prepared on sapphire substrate by ECR plasma sputtering method”
S. Kaneko, H. Torii, T. Amazawa, T. Ito, M. Yasui, M. Kurouchi, A. Fukushima, T. Tokumasu, S. Lee, S. Park, H. Takikawa, M. Yoshimoto
Japanese Journal of Applied Physics, Vol.53, 11RA11, pp.1-4 (2014.10), doi:10.7567/JJAP.53.11RA11
  95. “Plasma irradiation of artificial cell membrane system at solid-liquid interface”
R. Tero, Y. Suda, R. Kato, H. Tanoue, H. Takikawa
Applied Physics Express, Vol.7, 077001 (2014.11), doi:10.7567/APEX.7.077001
  94. 「グライディングアークの出射孔サイズが樹脂フィルム印字面前処理に及ぼす影響」
“Influence of exit aperture size of gliding arc on pre-treatment of polymer film prior to ink jet printing”
内田裕也,須田善行,滝川浩史,田上英人,山本五男
プラズマ応用科学, Vol.22, 1, pp.29-36 (2014.6)
  93. “Fabrication of DLC-based micro-gear patterns by room-temperature curing nanoimprint lithography using glass-like carbon molds”
S. Kiyohara, T. Ikegaki, C. Ito, I. Ishikawa, H. Tanoue, H. Takikawa, Y. Taguchi, Y. Sugiyama, Y. Omata, Y. Omata, Y. kurashima
Materials Research Society Symposia Proceedings., Vol.1511, msf12-1511-ee05-01, pp.1-7(2013.1), doi:10.1557/opl.2013.21
  92. “Properties of epitaxial AlN thin film deposited on sapphire substrate by ECR plasma”
S. Kaneko, T. Ito, M. Yasui, M. Kurouchi, H. Torii, T. Amazawa,T. Tokumasu, T. Nagano, S. Lee, S. Park, H. Takikawa
IEEE Advanced Infocomm Technology, pp.69-70 (2013.7), doi:10.1109/ICAIT.2013.6621498
  91
.
“Nanofabrication of DLC-dot arrays by room-temperature curing Imprint-liftoff method”
S. Kiyohara, S. Matta, I. Ishikawa, H. Tanoue, H. Takikawa, Y. Taguchi, Y. Sugiyama, Y. Omata, Y. Kurashima
Materials Research Society Symposia Proceedings, Vol.1511, msf12-1511-ee05-02, pp.1-6 (2013.1), doi: 10.1557/opl.2013.15
  90. “Fabrication of Micro-OLEDs by room-temperature curing nanocontact-print lithography using DLC molds”
I. Ishikawa, K. Sakurai, S. Kiyohara, T. Okuno, H. Tanoue, Y. Suda, H. Takikawa, Y. Taguchi, Y. Sugiyama, Y. Omata, Y. Kurashima
Materials Research Society Symposia Proceedings., Vol.1511, mrsf12-1511-ee05-01, pp.1-7 (2013.1), doi:10.1557/opl.2012.1711
  89. “Contract lattice constant in epitaxial MgO thin film from point view of ab initio calculation”
S. Kaneko, M. Yoshimoto, H. Takikawa
Proceedings of the International Conference on Research in Condensed Matter Physics, pp.4-7(2012)
 88. 「膜種の異なるDLCの有機酸潤滑下における摩擦特性」
“Friction properties of various DLC coatings under organic acid lubrication”
吉田健太郎,加納眞,滝川浩史,益子正文
トライボロジスト,Vol.57, No.6, pp.426-431 (2012.6)
  87. “Fabrication of diamond nanopit arrays by room-temperature curing nanoimprint lithography using glass-like carbon molds”
S. Kiyohara, C. Ito, I. Ishikawa, H. Takikawa, Y. Taguchi, Y. Sugiyama, Y. Omata, Y. Kurashima
Materials Research Society Symposia Proceedings, Vol.1395, mrsf1-1395-n12-02, p.27-32 (2012.1), doi:10.1557/opl.2012.9
  86. 「ガスプラズマ銃支援フィルタードアーク蒸着装置を用いた窒化クロム膜の作製」
CrN films prepared by plasma gun assisted filtered-arc-deposition method
田上英人,柳田太一郎,神谷雅男,須田善行,滝川浩史,瀧真,長谷川祐史,石川剛史, 辻信広
プラズマ応用科学, Vol.19, No.2, pp.107-112 (2011.12)
  85. 「中真空動作磁気引き出し型ガスプラズマ銃の開発と基礎特性」
“Development of electromagnetically pulled-out gas plasma (EPOP) gun for medium vacuum and its fundamental discharge characteristics”
柳田太一郎,田上英人,神谷雅男,須田善行,滝川浩史,瀧真,長谷川祐史,石川剛史
電気学会論文誌,Vol.A-131, No.2, pp.139-144 (2011.2), doi:10.1541/ieejfms.131.139
  84. “Mass density as basis parameter on mechanical properties under diamond-like carbon prepared in wide range of conditions using variety of methods”
S. Kaneko, T. Horiuchi, K. Yoshida, S. Tanaka, C. Kato, M. Kano, M. Kumagai, H. Tanoue, M. Kamiya, H. Takikawa
Japanese Journal of Applied Physics, Vol.50, pp.01AF11-1-3 (2011.1), doi:10.1143/JJAP.50.01AF11
  83. “Removal of diamond-like carbon film by oxygen-dominated plasma beam converted from filtered carbon-cathodic arc”
H. Tanoue, M. Kamiya, Y. Suda, S. Oke, H. Takikawa, Y. Hasegawa, M. Taki, N. Tsuji, T. Ishikawa, H. Yasui
Japanese Journal of Applied Physics, Vol.50, pp.01AF12-1-6 (2011.1), doi:10.1143/JJAP.50.01AF12
  82. 「フィルタードアークプラズマビームの磁界制御によるドロップレットフリーDLC膜の形成」
“Preparation of droplet-free diamond-like carbon film by magnetically controlled filtered-arc-plasma beam”
奥田浩史,神谷雅男, 田上英人,須田善行,滝川浩史
プラズマ応用科学, Vol.18, No.2, pp.159-164 (2010.12)
  81. “T-shape filtered arc deposition system with built-in electrostatic macro-particle trap for DLC film preparation”
M. Kamiya, T. Yanagita, H. Tanoue, S. Oke, Y. Suda, H. Takikawa , M. Taki, Y. Hasegawa, T. Ishikawa, H. Yasui
Thin Solid Films, Vol.518, pp.1498-1502 (2009.12) , doi:10.1016/j.tsf.2009.09.091
  80. 「フィルタードアーク蒸着で形成したダイヤモンドライクカーボン膜の光学特性」
“Optical properties of various diamond-like carbon films fabricated by filtered arc deposition”
神谷雅男, 川口祐輔, 田上英人,須田善行,滝川浩史
プラズマ応用科学, Vol.17, No.2, pp.125-132 (2009.12)
  79. “Preparation of various DLC films by T-shaped filtered arc deposition and the effect of heat treatment on film properties”
M. Kamiya, H. Tanoue, H. Takikawa, M. Taki, Y. Hasegawa, M. Kumagai
Vacuum, Vol.83, pp.510-514 (2008.10), doi:10.1016/j.vacuum.2008.04.016
  78. “Removal of machine oil from metal surface by mesoplasma jet under open atmosphere”
H. Saito, H. Shiki, K. Tsujii, S. Oke, Y. Suda, H. Takikawa, T. Okawa, S. Yamanaka
Japanese Journal of Applied Physics, Vol.48, pp.08HH03-1-5 (2009.8), doi:10.1143/JJAP.48.08HH03
  77. “Nanofabrication of three-dimensional imprint diamond molds by ECR oxygen ion beams using polysiloxane”
S. Kiyohara, T. Kashiwagi, H. Takikawa, Y. Kurashima, Y. Taguchi, Y. Sugiyama
e-Journal of Surface Science and Nanotechnology,Vol.7, pp.772-776 (2009.7), doi:http://doi.org/10.1380/ejssnt.2009.772
  76. “Development of Y-shaped filtered-arc-deposition system for preparing multielement composition-controlled film”
H. Tanoue, H. Hikosaka, T. Mashiki, S. Oke, Y. Suda, H. Takikawa, Y. Hasegawa, M. Taki, M. Kamiya, T. Ishikawa, H. Yasui
IEEE Transactions on Plasma Science,Vol.37, No.7, pp.1140-1145 (2009.7), doi:10.1109/TPS.2009.2014765
  75. “Development of twin PEN-Jet system for oil film removal”
H. Takikawa, H. Saito, H. Shiki, K. Tujii, S. Oke, Y. Suda, S. Yamakawa, T. Okawa
Frontier of Applied Plasma Technology,Vol.2, pp.39-42 (2009.7)
  74. “Argon-dominated plasma beam generated by filtered vacuum arc and its substrate etching”
H. Tanoue, M. Kamiya, S. Oke, Y. Suda, H. Takikawa, Y. Hasegawa, M. Taki, M. Kumagai, M. Kano, T. Ishikawa, H. Yasui
Applied Surface Science,Vol.255,pp.7780-7785 (2009.7), doi:10.1016/j.apsusc.2009.04.170
  73. 「大気圧メゾプラズマジェットにおけるPt-Rh電極の損耗」
“Erosion of Pt-Rh electrode in atmospheric-pressure mesoplasma jet”
志岐肇,桶真一郎,須田善行,滝川浩史,山中重宣,大川隆
電気学会論文誌, Vol.A-129, 3, pp.157-158 (2009.3, doi:10.1541/ieejfms.129.157
  72. 「パルスグライディングアークにおける直列インダクタンスの影響」
志岐肇,齋藤春樹,桶真一郎,須田善行,滝川浩史,大川隆,山中重宣,西村芳美,菱田茂二,薄木英二
プラズマ応用科学,Vol.16, No.2, pp.105-112 (2008.12)
  71. “Fundamental properties of 4-in-1 Plasma ENergized-Jet at atmospheric pressure”
H. Shiki, Y. Ito, H. Takikawa, E. Usuki, T. Okawa, S. Yamanaka, Y. Nishimura, S. Hishida
Vacuum, Vol.83, pp.29-33 (2008.9), doi:10.1016/j.vacuum.2008.03.033
  70. “Low-temperature sintering of indium tin oxide thin film using split gliding arc plasma”
Y. Ito, H. Shiki, H. Takikawa, T. Ootsuka, T. Okawa, S. Yamanama, E. Usuki
Japanese Journal of Applied Physics, Vol.47, No.8S2, pp. 6956--6959 (2008.8), doi:10.1143/JJAP.47.6956
  69. 「4-in-1 PEN-Jetにおける内部電極放電電流の個別制御」
“Indvidual control of discharge current of inner electrodes in 4-in-1 pen-jet”
志岐肇,齋藤春樹,桶真一郎,須田善行,滝川浩史,薄木英二,大川隆,山中重宣,西村芳美,菱田茂二
プラズマ応用科学,Vol.16, No.1, pp.69-72 (2008
  68. “Development of split gliding arc for surface treatment of conductive material”
H. Shiki, J. Motoki, Y. Ito, H Takikawa, T. Ootsuka, T. Okawa, S. Yamanaka, E. Usuki, Y Nishimura, S. Hishida, T. Sakakibara
Thin Solid Films, Vol.516, No.11, pp.3684-3689 (2008.4)), doi:10.1016/j.tsf.2007.08.047
  67. 「大気圧空気メゾプラズマジェット発生用パルスアークにおける電極損耗」
“Electrode erosion in pulsed arc for generating air meso-plasma jet under atmospheric pressure”
志岐肇, 元木 純平, 滝川 浩史, 榊原 建樹, 西村 芳実, 菱田 茂二,大川 隆,大塚 剛史
電気学会論文誌, Vol.A-127, No.10, pp.567-573 (2007.10), doi:10.1541/ieejfms.127.567
  66. “Development of X-shaped filtered-arc-deposition (X-FAD) apparatus and DLC/Cr film preparation”
H. Tanoue, H. Hikosaka, Y. Iwasaki, H. Takikawa, T. Sakakibara, Y. Hasegawa
IEEE Transactions on Plasma Science, Vol.35, pp.1014-1019 (2007.8), doi:10.1109/TPS.2007.896755
  65. “Review of cathodic arc deposition for preparing droplet-free thin films"
H. Takikawa, H. Tanoue
IEEE Transactions on Plasma Science, Vol.35, pp.992-999 (2007.8), doi:10.1109/TPS.2007.897907
  64. 「マルチインナー電極大気圧プラズマジェットの開発」
“Development of atmospheric-pressure plasma-jet with multi-inner-electrodes”
志岐肇,元木純平,伊藤之一,滝川浩史,薄木英二,大塚剛史,大川隆,山中重宣,榊原建樹
プラズマ応用科学,Vol.15, No.1, pp.23-28 (2007.6)
  63. “Influence of duct bias on deposition rate of DLC film in T-shape filtered arc deposition”
Y. Iwasaki, S. Minamisawa, H. Takikawa, T. Sakakibara, H. Hasegawa
Vacuum, Vol.80, pp.1266-1271 (2006.9), doi:10.1016/j.vacuum.2006.01.060
  62. 「厚膜ta-C形成用X字状フィルタードアーク蒸着装置の開発」
“Development of X-shape filtered arc deposition apparatus for thick ta-C film coating”
彦坂博紀,岩崎康浩,滝川浩史,榊原建樹,長谷川裕史,辻信広
電気学会論文誌, Vol.A-126, No.8, pp.757-762 (2006.8), doi:10.1541/ieejfms.126.757
  61. 「グライディングアークプラズマのマルチ化技術」
“Pluralization technique of gliding arc plasma”
志岐肇,元木純平,滝川浩史,徐国春,榊原建樹,西村芳実,菱田茂二,西毅,大川隆
プラズマ応用科学,Vol.12,pp.41-46 (2004.12)
  60. “Fabrication of diamond-like carbon film on rubber by T-shape filtered-arc-deposition under the influence of various ambient grses”
H. Takikawa, N. Miyakawa, S. Minamisawa, T. Sakakibara
Thin Solid Films, Vol.457 pp.143-150 (2004.6), doi:10.1016/j.tsf.2003.12.029
  59. 「真空アーク蒸着法によるダイヤモンド様炭素成膜における巨視的プロセス特性の陰極素材依存性」
“Cathode material dependence on macroscopic process properties in DLC film preparation using filtered cathodic arc deposition”
南澤伸司,宮川伸秀,滝川浩史,榊原建樹,窪島隆一郎,椎名祐一
真空, Vol.47, No.3, pp.200-203 (2004.3), doi:10.3131/jvsj.47.200
  58. “Physical–chemical hybrid deposition of DLC film on rubber by T-shape filtered-arc-deposition”
N. Miyakawa, S. Minamisawa, H. Takikawa, T. Sakakibara
Vacuum, Vol.73, pp.611-617 (2004.4), doi:10.1016/j.vacuum.2003.12.079
  57. 「真空アーク蒸着法によるゴム表面へのDLC膜形成」
“Preparation of DLC film on rubber surface by vacuum arc deposition”
宮川伸秀,南澤伸司,岩崎康浩,松下卓史,竹村恵子,滝川浩史,榊原建樹
プラズマ応用科学,Vol.11, pp.81-86 (2003.12)
  56. 「T字状フィルタードアーク蒸着装置によるゴム表面への柔軟性DLC膜形成」
“Preparation of elastic DLC film on rubber by t-shape filtered arc deposition”
滝川浩史,宮川伸秀,年藤淳吾,南澤伸司,松下卓史,竹村恵子,榊原建樹
電気学会論文誌,Vol.A-123, No.8, pp.738-743 (2003.8), doi:10.1541/ieejfms.123.738
  55. “Cold arc-plasma jet under atmospheric pressure for surface modification”
J. Toshifuji, T. katsumata, H. Takikawa, T. Sakakibara, I. Shimizu
Surface and Coatings Technology, 1Vol.171, pp.302-306 (2003.7), doi:10.1016/S0257-8972(03)00290-1
  54. “Development of shielded cathodic arc deposition with a superconductor shield”
H. Takikawa, N. Miyakawa, T. Sakakibara
Surface and Coatings Technology, Vol.171, pp.162-166 (2003.7), doi:10.1016/S0257-8972(03)00262-7
  53. “Enhancement of shielded cathodic arc deposition”
H. Takikawa, M. Nagayama, R. Miyano, T. Sakakibara
Surface and Coatings Technology, Vol.169-170, pp.49-52 (2003.6), doi:10.1016/S0257-8972(03)00079-3
  52. “Surface modification of PET film by plasma-based ion implantation”
N. Sakudo, D. Mizutani, Y. Ohmura, H. Endo, R. Yoneda, N. Ikenaga, H. Takikawa
Nuclear Instruments and Methods in Physics Research, Vol.B-206, pp.687-690 (2003.5), doi:0.1016/S0168-583X(03)00824-3
  51. 「磁気輸送シールド型真空アーク蒸着法によるCu配線膜形成の基礎実験」
“Preliminary experiments of Cu interconnect preparation by magnetically transported-shielded cathodic arc deposition”
宮川伸秀,南澤伸司,丸中正雄,土井聡也,滝川浩史,榊原建樹
電気学会論文誌,Vol.A-123, No.5, pp462-467 (2003.5), doi:10.1541/ieejfms.123.462
  50. “DLC thin film preparation by cathodic arc deposition with a super droplet-free system”
H. Takikawa, K. Izumi, R. Miyano, T. Sakakibara
Surface and Coatings Technology, Vol.163-164, pp.368-373 (2003.1), doi:10.1016/S0257-8972(02)00629-1
  49. 「プラズマイオン注入/成膜装置から漏洩するX線の計測」
“Measurement of X-ray leaked from plasma based ion implantation/deposition apparatus”
日比美彦,滝川浩史,年藤淳吾,西村芳実,榊原建樹
プラズマ応用科学,Vol.10,pp.102-109 (2002.12)
  48. “The properties of nanocomposite aluminium-silicon based thin films deposited by filtered arc deposition”
A. Bendavid, P. Martin, H. Takikawa
Thin Solid Films, Vol.420, pp.83-88 (2002.12), doi:10.1016/S0040-6090(02)00660-0
  47. “Cathodic arc deposition with activated anode (CADAA) for preparation of in situ doped thin solid films”
H. Takikawa, K. Kimura, R. Miyano, T. Sakakibara
Vacuum, Vol.65, pp.443-438 (2002.5), doi:10.1016/S0042-207X(01)00453-5
  46. “Influence of gap length and pressure on medium vacuum arc with Ti cathode in various ambient gases”
R. Miyano, T. Saito, H. Takikawa, T. Sakakibara
Thin Solid Films, Vol.407, pp.221-226 (2002.3), doi:10.1016/S0040-6090(02)90042-8
  45. 「磁気フィルタ型陰極アークプラズマによるダイヤモンドライクカーボン薄膜の合成」
“Deposition of diamond-like carbon film using magnetically filtered cathodic-arc-plasma”
滝川浩史,泉喜久夫,榊原建樹
プラズマ応用科学. Vol.9, pp.49-56 (2001.12)
  44. “Cathode spot motion in vacuum arc of zinc cathode under oxygen gas flow”
R. Miyano, Y. Fujimura, H. Takikawa, T. Sakakibara, M. Nagao
IEEE Transactions on Plasma Science, Vol.29, pp.713-719 (2001.10), doi:10.1109/27.964460
  43. “Anode mode in cathodic arc deposition apparatus with various cathodes and ambient gases”
R. Miyano, T. Saito, K. Kimura, M. Ikeda, H. Takikawa, T. Sakakibara
Thin Solid Films, Vol.390, pp.192-196 (2001.6), doi:10.1016/S0040-6090(01)00918-X
  42. “Formation and deformation of multiwall carbon nanotubes in arc discharge”
H. Takikawa, Y. Tao, R. Miyano, T. Sakakibara, X. Zhao, Y. Ando
Japanese Journal of Applied Physics, Vol.40, Part 1, No.5A, pp.3414-3418 (2001.5), doi:10.1143/JJAP.40.3414
  41. “Effect of substrate bias on AlN thin film preparation in shielded reactive vacuum arc deposition”
H. Takikawa, K. Kimura, T. Sakakibara, A. Bendavid, P. J. Martin, A. Matsumuro, K. Tsutsumi
Thin Solid Films, Vol.386, pp.276-280 (2001.5), doi:10.1016/S0040-6090(00)01673-4
  40. “Corrosion resistance of TiN coatings produced by various dry processes”
R. Morita, K. Azuma, S. Inoue, R. Miyano, H. Takikawa, A. Kobayashi, E. Fujiwara, H. Uchida, M. Yatsuzuka
Surface and Coatings Technology, Vol.136, pp.207-210 (2001.2), doi:10.1016/S0257-8972(00)01057-4
  39. 「真空アークプラズマの磁気輸送とドロップレット削減効果」
“Magnetic transportation of vacuum arc plasma and droplet filtering”
池田光邦,泉喜久夫,宮野竜一,日比美彦,滝川浩史,榊原建樹
プラズマ応用科学,Vol.8,pp.80-87 (2000.12)
  38. “ZnO film formation using a steered and shielded reactive vacuum arc deposition”
H. Takikawa, K. Kimura, R. Miyano, T. Sakakibara
Thin Solid Films, Vol.377-378, pp.74-80 (2000.12), doi:10.1016/S0040-6090(00)01387-0
  37. “Preparation of metal nitride and oxide thin films using shielded reactive vacuum arc deposition”
R. Miyano, K. Kimura, K. Izumi, H. Takikawa, T. Sakakibara
Vacuum, Vol.59, pp.159-167 (2000.10), doi:10.1016/S0042-207X(00)00266-9
  36. “Carbon nanotube growth at cathode spot in vacuum arc”
H. Takikawa, Y. Tao, R. Miyano, T. Sakakibara, Y. Ando, S. Itoh
Transactions of the Materials Research Society of Japan, 25, pp.873-876 (2000.9)
  35. “Preparation of fullerene thin films by ion plating and transmittance analysis”
R. Miyano, M. Ikeda, H. Takikawa, T. Sakakibara
The Transactions of the Institute of Electrical Engineers in Japan (電気学会論文誌), Vol.A-120, No.8/9, pp.851-852 (2000.12)
  34. “Ion energy measurement in shielded vacuum arc with graphite cathode”
R. Miyano, M. Nagayama, H. Takikawa, T. Sakakibara
The Transactions of the Institute of Electrical Engineers in Japan (電気学会論文誌), Vol.A-120, No.6 , pp.724-725 (2000.6)
  33. “ZnO film fabrication by reactive shielded vacuum arc deposition”
H. Takikawa, K. Kimura, R. Miyano, T. Sakakibara
Transactions of the Materials Research Society of Japan, Vol.25, No.1, pp.345-348 (2000.4)
  32. “Carbon nanotubes in cathodic vacuum arc discharge”
H. Takikawa, M. Yatsuki, T. Sakakibara, S. Itoh
Journal of Physics D: Applied Physics, 3Vol.33, No.7, pp.826-830 (2000.4), doi: 10.1088/0022-3727/33/7/311
  31. “Deposition and modification of titanium dioxide thin films by filtered arc deposition”
A. Bendavid, P. J. Martin, H. Takikawa
Thin Solid Films, Vol.360, 241-249 (2000.2), doi: 10.1016/S0040-6090(99)00937-2
  30. 「プラズマイオン注入法および各種ドライプロセス法によって作製したTiNの耐食性評価」
“Corrosion resistance of TiN prepared by plasma-based ion implantation and various dry processes”
東欣吾,森田隆平,八束充保,井上尚三,内田仁,宮野竜一,滝川浩史,小林明
プラズマ応用科学,Vol.7,pp.30-37 (1999.12)
  29. 「パルス電流真空アークの放電特性とドロップレット抑制効果」
“Discharge characteristics of vacuum arc with pulse current and efficiency of macrodroplet suppression”
木村圭作,滝川浩史,榊原建樹
プラズマ応用科学,Vol.7,pp.3-10 (1999.12)
  28. 「TiN膜生成用シールド型真空アーク蒸着装置におけるプラズマパラメータ計測」
“Measurements of plasma parameters in a shielded vacuum arc deposition apparatus for TiN film fabrication”
宮野竜一,滝川浩史,新迫浩二,榊原建樹
電気学会論文誌,Vol.A-119,No.12, pp.1397-1402 (1999.12)
  27. “Structural and optical properties of titanium oxide thin films deposited by filtered arc deposition”
A. Bendavid, P. J. Martin, A*. Jamting, H. Takikawa
Thin Solid Films, Vol.355-356, pp.6-11 (1999.11), doi:10.1016/S0040-6090(99)00436-8
  26. “Synthesis of a-axis-oriented AlN film by a shielded reactive vacuum arc deposition method”
H. Takikawa, N. Kawakami, T. Sakakibara
Surface and Coatings Technology, Vol.120-121, pp.383-387 (1999.11), doi:10.1016/S0257-8972(99)00389-8
  25. 「種々の反応性真空アーク蒸着装置によるアモルファス酸化チタン膜の生成」
“Fabrication of amorphous titanium oxide films with various reactive vacuum arc deposition apparatuses”
滝川浩史,松井健晃,宮野竜一,榊原建樹,A. Bendavid, P. J. Martin
電気学会論文誌,Vol.A-119,No.10, pp.1243-1248 (1999.10)
  24. “N2 gas absorption in cathodic arc apparatus with an Al cathode under medium vacuum”
H. Takikawa, N. Kawakami, T. Sakakibara
IEEE Transactions on Plasma Science, Vol.27, pp.1034-1038 (1999.8), doi:10.1109/27.782277
  23. “Carbon nanotubes fabricated at the cathode spot in a vacuum arc”
H. Takikawa, M. Yatsuki, O. Kusano, T. Sakakibara
The Transactions of the Institute of Electrical Engineers in Japan (電気学会論文誌), Vol.A-119, No.8/9 , pp.1156-1157 (1999.8)
  22. “Ionized plasma vapor deposition and filtered arc deposition; processes, properties and applications”
P. J. Martin, A. Bendavid, H. Takikawa
Journal of Vacuum Science and Technology A, Vol.17, pp.2351-2359 (1999.7), doi:10.1116/1.581772
  21. “Properties of titanium oxide film prepared by reactive cathodic vacuum arc deposition”
H. Takikawa, T. Matsui, T. Sakakibara, A. Bendavid, P. J. Martin
Thin Solid Films, Vol.348, pp.145-151 (1999.7), doi:10.1016/S0040-6090(99)00054-1
  20. 「Ti陰極N2ガス導入真空アークプラズマの質量スペクトルおよびイオンエネルギー分布計測」
“Mass spectroscopy and ion energy distribution measurement in vacuum arc plasma with Ti cathode and N2 gas flow”
滝川浩史,宮野竜一,真鍋和男,榊原建樹
電気学会論文誌,Vol.A-119,No.2pp.183-189 (1999.2)
  19. 「真空アーク蒸着装置におけるドロップレット遮蔽板の電流-電圧特性」
“Current-voltage characteristics of droplet shield plate in vacuum arc deposition apparatus”
宮野竜一,滝川浩史,真鍋和男,新迫浩二,榊原建樹
電気学会論文誌,Vol.A-119,No.1, pp.19-24 (1999.1)
  18. 「反応性真空アーク蒸着法によって生成したアナターゼ型TiO2膜の光学バンドギャップ」
“Optical bandgap of anatase TiO2 film prepared by reactive vacuum arc deposition method”
滝川浩史,松井健晃,榊原建樹
電気学会論文誌,avol.A-118,No.7/8, pp.899-900 (1998.7)
  17. “TiN/Ti film formation by vacuum arc deposition with droplet shield plate”
H. Takikawa, K. Shinsako, T. Sakakibara
Thin Solid Films, Vol.316, pp.73-78 (1998.3), doi:10.1016/S0040-6090(98)00392-7
  16. Synthesis of anatase TiO2 film by reactive vacuum arc deposition method”
H. Takikawa, T. Sasaoka, T. Sakakibara
Electrical Engineering in Japan, Vol.126, pp.12-20 (1999.2, doi:10.1002/(SICI)1520-6416(199903)126:4<12::AID-EEJ2>3.0.CO;2-7
  15. 「反応性真空アーク蒸着法によるアナターゼ型TiO2膜の生成」
“Synthesis of anatase TiO2 film by reactive vacuum arc deposition method”
滝川浩史,笹岡毅志,榊原建樹
電気学会論文誌,Vol.A-117, No.8, pp.866-872 (1997.8)
  14. “Influence of power supply on continuity of vacuum arc with Al cathode and N2 flow under medium vacuum”
H. Takikawa, K. Tanaka, T. Sakakibara
Electrical Engineering in Japan, 1Vol.128, 3, pp.9-15 (1999.6)
  13. 「中真空におけるAl陰極N2フロー真空アークの放電持続性に及ぼす電源の影響」
“Influence of power supply on continuity of vacuum arc with Al cathode and N2 flow under medium vacuum”
滝川浩史,田中邦泰,榊原建樹
電気学会論文誌,Vol.A-117,No.7, pp.660-664 (1997.7)
  12. 「窒化チタン膜生成用真空アーク蒸着装置における圧力変化と窒素固定量」
“Pressure change and N2 fixation in a vacuum arc deposition apparatus for producing TIN film”
滝川浩史,井上友喜,榊原建樹
電気学会論文誌,Vol.A-116, No.5, pp.424-429 (1996.5)
  11. 「圧力上昇に伴うグローからアークへの移行とアーク移行確率-圧力特性」
“Glow to arc transition accompanying pressure increase and transition probability -- pressure characteristics”
滝川浩史,宮野竜一,榊原建樹
電気学会論文誌,Vol.A-115, No.11. pp.1057-1061 (1995.11)
  10. 「中真空におけるグロー放電を介したアーク点弧方式」
“A method of arc ignition via glow discharge in medium vacuum”
滝川浩史,井上友喜,宮野竜一,榊原建樹
電気学会論文誌,Vol.A-115, No.4, pp.386-387 (1995.4)
  9. 「種々のプラスチックチューブ内に点弧された溶発アークの電界の強さと溶発ガス量」
“Electric field strengths of the arcs burning through various plastic tubes and their ablation gas volumes”
滝川浩史,大西隆二,榊原建樹
電気学会論文誌,Vol.A-114, pp.610-616 (1994.9)
  8. 「AlN膜生成用真空アーク蒸着装置における放電変動の抑制」
“Suppression of discharge fluctuation in vacuum arc deposition apparatus for producing AIN film”
滝川浩史,高松秀樹,榊原建樹,鈴木泰雄
電気学会論文誌,Vol.A-114, No.3, pp.217-222 (1994.3)
  7. 「低電流真空アークの陽極モードとプラズマパラメータ」
“Anode modes and plasma parameters of Low current vacuum arc”
滝川浩史,藤島友紀,榊原建樹
電気学会論文誌,Vol.A-114, No.2, pp.123-128 (1994.2)
  6. 「真空アーク蒸着装置における黒鉛陰極点の逆行速度」
“Retrograde motion velocity of graphite cathode spot in vacuum arc deposition apparatus”
宮野竜一,滝川浩史,榊原建樹,鈴木泰雄
電気学会論文誌, Vol.A-114, No.2, pp.117-122 (1994.2)
  5. “Diamond-like carbon film produced by vacuum arc deposition technique and its surface appearance”
H. Takikawa, K. Taketomi, T. Sakakibara
Electrical Engineering in Japan, Vol.114, No.5, pp.24-30 (1994.8), doi:10.1002/eej.4391140504
  4. 「真空アーク蒸着法を用いたダイヤモンドライクカーボン膜の生成とその表面形状」
“Diamond-Like carbon film produced by vacuum arc deposition technique and its surface appearance”
滝川浩史,武富浩一,榊原建樹
電気学会論文誌,Vol.A-113, No.9, pp.654-659 (1993.9)
  3. 「低電流真空アーク放電の拡散アークモードからフットポイントモードへの移行 -窒素ガス圧の影響-」
“Transition from diffuse-arc mode to footpoint mode in low-current vacuum arc
-The influence of ambient N2 gas pressuer-“
滝川浩史,藤島友紀,榊原建樹
電気学会論文誌,Vol.A-113, No.6, pp.486-487 (1993.6)
  2. 「真空アーク蒸着法によって生成されたAlN膜の膜質」
“Properties of AIN film formed by vacuum arc deposition process”
滝川浩史,小切山正,榊原建樹
電気学会論文誌,Vol.A-111, No.12, pp.1042-1046 (1991.12)
  1. 「反応性真空アークプラズマ診断用加熱型プローブ」
“Emissive probe for diagnostics of reactive vacuum arc plasma”
滝川浩史,松尾廣伸,榊原建樹
電気学会論文誌,Vol.A-111, No.11, pp.1025-1026 (1991.11)